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Scope

The 34th International Symposium on Dry Process (DPS2012) will be held at Takeda Sentanchi Building, Asano campus of the University of Tokyo on November 15-16, 2012.
Dry Processes are the state of the art technologies leading the way through ultra-high performance in microelectronic devices. The DPS has provided a valuable forum of discussion on science and technology of new developments in this field for more than three decades.

Important dates

Abstract Submission Deadline: August 12, 2012, 24:00 (JST, GMT+9:00)
July 29, 2012, 24:00(JST, GMT+9:00)
Early Registration Deadline: October 16, 2012, 24:00 (JST, GMT+9:00)
Late Registration Deadline: October 31, 2012, 24:00 (JST, GMT+9:00)

Recent Updates

  • November 13, 2012  Submission deadline to JJAP special issue has been extended to November 22, 2012.
  • September 21, 2012  On-line registration is open.
  • August 12, 2012  On-line abstract submission system was closed.
  • July 30, 2012  Submission deadline has been extended to August 12, 2012.
  • July 13, 2012  On-line abstract submission system is open.
  • March 15, 2012  DPS2012 website open.

News for Japanese members

応用物理学会プラズマエレクトロニクス分科会の協賛により、DPS前日の11月14日(水)に同会場にて「第23回プラズマエレクトロニクス講習会」を開催致します。
同講習会ではプラズマの基礎についてのレクチャーから前年度のDPS2011の振り返りまでが予定されております。詳しくは下記HPをご参照ください。
http://annex.jsap.or.jp/plasma/PE_files/kousyu2012/index.html