DPS2014 - 36th International Symposium on Dry Process

Theme

• Dry Etching Technology for New Generation Lithography
• Atomic Layer Etching / Atomic Layer Deposition

Topics

1. Etching Technology
2. Manufacturing Technology(AEC, APC, EES, FDC)
3. Surface Reaction and Damage
4. Plasma Diagnostics and Monitoring System
5. Modeling and Simulation
6. Plasma Generation(Equipment/Source)
7. CVD/PVD/ALD
8. Plasma Processes for 3D Device, FPD, Photovoltaic Devices
9. Plasma Processes for New Material Devices (MRAM, Power, Organic)
10. Plasma Processes for Biological and Medical Application, MEMS
11. Atmospheric Pressure Plasma and Liquid Plasma
12. New Dry Process Concepts