DPS2014 - 36th International Symposium on Dry Process

Invited speakers and tentative titles

• Dr. Yasuaki Ishikawa (NAIST)
  "ALD's oxidant effect on characteristics as an oxide dielectric"
• Dr. Paul Poodt (TNO/Holst Centre)
  "Spatial Atomic Layer Deposition for large-area and flexible electronics"
• Dr. Shahid Rauf (Applied Materials Inc.)
  "Atomic precision etch for semiconductor manufacturing"
• Dr. Geun Young Yeom (Sungkyunkwan University)
  "Application of atomic layer etching for Si-based devices"
• Dr. Hironobu Sato (EIDEC)
  "Sub-10nm directed self-assembly lithography using high chi block copolymers"
• Dr. Laxminarayan Raja (Univ. of Texas at Austin)
  "Computational simulations of streamer discharges for reactive plasma applications at atmospheric pressures"
• Dr. Rui Zhang (Univ. of Tokyo)
  "MOS interface passivation of Ge MOSFETs by plasma post oxidation"
• Dr. Meng-Jiy Wang (National Taiwan University of Science and Technology)
  "Plasma surface modifications for modulating drug release and cell proliferation"
• Dr. Itaru Yanagi (Hitachi Ltd.)
  "A novel method for fabricating nanopores with diameters of sub-1 nm to 3 nm"
• Dr. Keiji Nakayama (Institute of Mesotechnology)
  "Atmospheric pressure plasma generated in a gap of dry and oil lubricated sliding contacts"