Committee

DPS 2017 » Committee

Committee Chairpersons

  • Organizing Committee Chair: Keizo Kinoshita (PETRA)
  • Executive Committee Chair: Hiroshi Akatsuka (Tokyo Institute of Technology)
  • Program Committee Chair: Miyako Matsui (Hitachi, Ltd.)
  • Publication Committee Chair: Kazuhiro Karahashi (Osaka University)

Organizing Committee

Chair:  K. Kinoshita (PETRA) Japan
Vice-chair:  T. Tatsumi (Sony Semiconductor Solutions Corp.) Japan
H. Akatsuka (Tokyo Institute of Technology) Japan
N. Fujiwara (Mitsubishi Electric Corp.) Japan
M. Fukasawa (Sony Semiconductor Solutions Corp.) Japan
S. Hamaguchi (Osaka University) Japan
H. Hayashi (Toshiba Corp.) Japan
M. Honda (TOKYO ELECTRON MIYAGI LTD.) Japan
M. Hori (Nagoya University) Japan
T. Ichiki (The University of Tokyo) Japan
T. Ishijima (Kanazawa University) Japan
K. Ishikawa (Nagoya University) Japan
K. Karahashi (Osaka University) Japan
H. Kokura (Samsung Electronics Co., Ltd) Korea
T. Koshizawa (Applied Materials Inc.) USA
M. Matsui (Hitachi, Ltd.) Japan
N. Negishi (Hitachi, Ltd.) Japan
K. Nojiri (Lam Research Corp.) Japan
T. Ohiwa (TOKYO ELECTRON LIMITED) Japan
T. Okumura (Panasonic Corp.) Japan
K. Sasaki (Hokkaido University) Japan
M. Sekine (Nagoya University) Japan

International Organizing Committee

A. Agarwal (KLA-Tencor Corp.) USA
W. Boullart (Interuniversity Microelectronics Center-IMEC) Belgium
J. Brcka (Tokyo Electron U.S. Holdings, Inc.) USA
H.Y. Chang (Korea Advanced Institute of Science and Technology) Korea
E-H. Choi (Kwangwoon University) Korea
O. Joubert (LTM/CNRS) France
W.M.M. Kessels (Eindhoven Univ. of Technology) Netherlands
K. C. Leou (National Tsing Hua University) Taiwan
T. Lill (Lam Research Corp.) USA
G. S. Oehrlein (University of Maryland) USA
L. Overzet (University of Texas at Dallas) USA
P. Ventzek (Tokyo Electron U.S. Holdings, Inc.) USA
J.S. Wu (National Chiao Tung University) Taiwan
G-Y. Yeom (Sungkyunkwan University) Korea
S-J. Yoo (NFRI) Korea

Executive Committee

Chair:  H. Akatsuka (Tokyo Institute of Technology) Japan
Vice-chair: M. Hori (Nagoya University) Japan
Vice-chair: K. Sasaki (Hokkaido University) Japan
T. Hirata (Tokyo City University) Japan
S. Mori (Tokyo Institute of Technology) Japan
T. Nozaki (Tokyo Institute of Technology) Japan
A. Okino (Tokyo Institute of Technology) Japan
N. Takeuchi (Tokyo Institute of Technology) Japan

Publication Committee

Chair:  K. Karahashi (Osaka University) Japan
Vice-chair:  T. Ishijima (Kanazawa University) Japan
Vice-chair:  K. Ishikawa (Nagoya University) Japan
T. Ichiki (The University of Tokyo) Japan
K. Eriguchi (Kyoto University) Japan
S. Higashi (Hiroshima University) Japan
K. Kinoshita (PETRA) Japan
N. Kuboi (Sony Semiconductor Solutions Corp.) Japan
H. Kuwano (Tohoku University) Japan
S. Nunomura (Advanced Industrial Science and Technology-AIST) Japan
L. Overzet (University of Texas at Dallas) USA
O. Sakai (University of Shiga Prefecture ) Japan
K. Sasaki (Hokkaido University) Japan
Y. Shimogaki (The University of Tokyo) Japan
M. Shiratani (Kyushu University) Japan
E. Stamate (Technical University of Denmark) Denmark
K. Takahashi (Kyoto Institute of Technology) Japan

Program Committee

Chair:  M. Matsui (Hitachi, Ltd.) Japan Japan
Vice-chair:  M. Fukasawa (Sony Semiconductor Solution Corp.) Japan
Vice-chair:  M. Honda (TOKYO ELECTRON MIYAGI LTD.)
J-P. Booth (CNRS/Ecole Polytechnique) France
K-N. Chen (National Chiao Tung University) Taiwan
R. Dussart (CNRS/Université d'Orléans) France
A. Dzarasova (Quantemol Ltd.) UK
D.J. Economou (University of Houston) USA
E. Eriguchi (Kyoto University) Japan
H. Hayashi (Toshiba Corp.) Japan
N. Hayashi (Kyushu University) Japan
T. Hayashi (Nagoya University) Japan
S. Higashi (Hiroshima University) Japan
M. Hiramatsu (Meijo University) Japan
T. Ichiki (The University of Tokyo) Japan
K. Ishikawa (Nagoya University) Japan
S. Y. Kang (Tokyo Electron Ltd.) Japan
K. Karahashi (Osaka University) Japan
Y. Kim (Hynix Semiconductor Inc.) Korea
H. Kobayashi (Hitachi, Ltd.) Japan
K. Koga (Kyushu University) Japan
H. Kokura (Samsung Electronics Co., Ltd.) Korea
H. Kondo (Nagoya University) Japan
A. Koshiishi (Samsung Electronics Co., Ltd.) Korea
T. Koshizawa (Applied Materials Inc.) Japan
N. Kuboi (Sony Semiconductor Solutions Corp.) Japan
S. Kumagai (Toyota Technological Institute) Japan
K. Kurihara (Toshiba Corp.) Belgium
H. Kuwano (Tohoku University) Japan
J-F. de Marneffe (Interuniversity Microelectronics Center-IMEC) Belgium
T. Maruyama (Renesas Electronics Corp.) Japan
S. Miyazaki (Nagoya University) Japan
H. Miyazoe (IBM Corp.) USA
Y. Morikawa (ULVAC Inc.) Japan
M. Morimoto (Hitachi High-Technologies Corp. Taiwan) Taiwan
K. Nakamura (Chubu University) Japan
M. Nakamura (MAMO) Japan
Y. Nakamura (Sony Semiconductor Manufacturing Corp.) Japan
M. Nakatani (Panasonic Corp.) Japan
N. Negishi (Hitachi, Ltd.) Japan
S. Nunomura (Advanced Industrial Science and Technology -AIST) Japan
T. Ohba (Lam Research Corp.) Japan
H. Ohtake (Tokyo Electron Ltd.) USA
T. Okumura (Panasonic Corp.) Japan
F. Roozeboom (Eindhoven University of Technology-TU/e) Netherlands
Y. Sakiyama (Lam Research Corp.) USA
K. Sasaki (Hokkaido University) Japan
M. Sekine (Nagoya University) Japan
Y. Setsuhara (Osaka University) Japan
D. Shamiryan (Mapper) Russia
Y. Shimogaki (The University of Tokyo) Japan
K. Shin (Samsung Electronics Co., Ltd.) Korea
T. Shirafuji (Osaka City University) Japan
M. Shiratani (Kyushu University) Japan
E. Stamate (Technical University of Denmark) Denmark
K. Takahashi (Kyoto Institute of Technology) Japan
M. Terahara (SanDisk Ltd.) Japan
H. Toyoda (Nagoya University) Japan
J. H. A. Um (Samsung Electronics Co., Ltd.) Korea
T. Watanabe (Waseda University) Japan
T. Yagisawa (Toshiba Corp.) Japan
H. Yamauchi (Sharp Corp.) Japan
G-Y. Yeom (Sungkyunkwan University) Korea

International Advisory Committee

Chair:  J. Nishizawa (Tohoku University) Japan
S. Fujimura (Tokyo Institute of Technology) Japan
R. A. Gottscho (Lam Research Corp.) USA
J-G. Han (Sungkyunkwan University) Korea
Y. Horiike (Tsukuba University) Japan
K. Horioka (Applied Materials Inc.) Japan
M. Izawa (Hitachi High-Technologies Corp.) Japan
T. Makabe (Keio University) Japan
K. Ono (Osaka University) Japan
H. Sugai (Nagoya University) Japan
S. Tachi Japan
K. Tachibana (Kyoto University) Japan
O. Takai (Kanto Gakuin University) Japan
K. Tsujimoto (JST) Japan
M. Yoneda ( ULVAC Inc.) Japan
S. Zaima (Nagoya University) Japan