DPS2025 46th International Symposium on Dry Process

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In conjunction with

AECAPC

Scope

The 46th International Symposium on Dry Process (DPS2025) will be held at the Shiki Museum, Matsuyama, Ehime, Japan from November 13 to 14, 2025. The Symposium covers all aspects of the rapidly evolving fields of dry processes, including but not limited to plasma etching and deposition processes, diagnostics and modeling of plasmas and surfaces, and surface modifications by plasmas, for the applications in, e.g., microelectronics, power devices, sensors, environmental protection, biological systems, and medicine. The DPS has provided valuable forums for in-depth discussion among professionals and students working in this exciting field for more than four decades.

abstract submission

Notice for Dry Process School

The first Dry Process School (Nov. 11-12, 2025) will be held right before the DPS in a nearby venue (on the campus of Ehime University).
Please join the lectures delivered by some of the world's most prominent experts in this field.

Important dates

Abstract Submission Deadline: July 14, 2025
Notification of Abstract Acceptance:
Early Registration Deadline:
Late Registration Deadline (Online):
Publish Proceedings (Abstracts):

Recent Updates

May. 07, 2025
On-Line Submission system is opened.
Apr. 08, 2025
Timetable(Tentative) is available.
Feb. 05, 2025
DPS2025 website open.

News for the Special Issues of Japanese Journal of Applied Physics (JJAP).

IF for the special issue of DPS in JJAP

1.67 (2017)

OPEN ACCESS & FREE ACCESS