DPS2025 46th International Symposium on Dry Process

Scope

The 46th International Symposium on Dry Process (DPS2025) will be held at the Shiki Museum, Matsuyama, Ehime, Japan from November 13 to 14, 2025. The Symposium covers all aspects of the rapidly evolving fields of dry processes, including but not limited to plasma etching and deposition processes, diagnostics and modeling of plasmas and surfaces, and surface modifications by plasmas, for the applications in, e.g., microelectronics, power devices, sensors, environmental protection, biological systems, and medicine. The DPS has provided valuable forums for in-depth discussion among professionals and students working in this exciting field for more than four decades.

Important dates

News for the Special Issues of Japanese Journal of Applied Physics (JJAP).

IF for the special issue of DPS in JJAP

1.67 (2017)

• Refer to the following page for the publication charge.
  https://iopscience.iop.org/journal/1347-4065/page/Publication_Charges
• JJAP Special Issues is published in the web site;
  DPS2024 (Jpn. J. Appl. Phys. 64 July 2025) (Free until July 2026)
  https://iopscience.iop.org/collections/jjap-250328-01
  DPS2023 (Jpn. J. Appl. Phys. 63 July 2024.) (Free until July 2025)
  https://iopscience.iop.org/collections/jjap-240402-02
  DPS2022 (Jpn. J. Appl. Phys. 62 July 2023.)
  https://iopscience.iop.org/issue/1347-4065/62/SI
  DPS2021 (Jpn. J. Appl. Phys. 61 July 2022.)
  https://iopscience.iop.org/issue/1347-4065/61/SI
  DPS2019 (Jpn. J. Appl. Phys. 59 June 2020.)
  https://iopscience.iop.org/issue/1347-4065/59/SJ
  DPS2018 (Jpn. J. Appl. Phys. 58 June 2019.)
  https://iopscience.iop.org/issue/1347-4065/58/SE