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The 37th International Symposium on Dry Process (DPS2015) will be held at Awaji Yumebutai International Conference Center, Awaji Island, in Japan, on November 5 & 6, 2015.
The Symposium covers all aspects of the rapidly evolving fields of dry processes, including but not limited to plasma etching and deposition processes, diagnostics and modeling of plasmas and surfaces, and surface modifications by plasmas, for the applications in, e.g., microelectronics, power devices, sensors, environmental protection, biological systems, and medicine. The DPS has provided valuable forums for in-depth discussion among professionals and students working in this exciting field for more than three decades.

Conference Hotel - The Westin  Awaji Island Resort & Conference Center (Starwood Hotels)

Important dates

   Late Registration Deadline:     October 21, 2015
   Conference Hotel Reservation
    October 13, 2015
   Early Registration Deadline:     September 30, 2015
   Late News(Postdeadline) Papers
   Submission Deadline:
    September 25, 2015
   Abstract Submission Deadline:     August 03 July 24 10, 2015

Recent Updates

News for the Special Issues of Japanese Journal of Applied Physics (JJAP).

News for Japanese members

応用物理学会プラズマエレクトロニクス分科会の協賛により、「第26回プラズマエレクトロニクス講習会」を 2015年11月20日(金)に東京大学 本郷(浅野)キャンパス 武田先端知ビル 「武田ホール」にて開催致します。
同講習会では、産業応用で必要とされる産業応用で必要とされるプロセスプラズマの生成、制御、計測の基礎と、その先端応用技術について、各分野にて第一線でご活躍の先生方より御講義頂く予定です。詳しくはこちら をご参照ください。