DPS 2020 42nd International Symposium on Dry Process

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Scope

The 42nd International Symposium on Dry Process (DPS2020) will be held at Masaru Ibuka Auditorium, Waseda University, Tokyo, Japan, from November 19 to 20, 2020. The Symposium covers all aspects of the rapidly evolving fields of dry processes, including but not limited to plasma etching and deposition processes, diagnostics and modeling of plasmas and surfaces, and surface modifications by plasmas, for the applications in, e.g., microelectronics, power devices, sensors, environmental protection, biological systems, and medicine. The DPS has provided valuable forums for in-depth discussion among professionals and students working in this exciting field for more than four decades.