DPS2014 - 36th International Symposium on Dry Process

Scope

The 36th International Symposium on Dry Process (DPS2014) will be held at Annex Hall of the PACIFICO YOKOHAMA on November 27-28, 2014.
Dry Processes are the state of the art technologies leading the way through ultra-high performance in microelectronic devices. The DPS has provided a valuable forum of discussion on science and technology of new developments in this field for more than three decades.

Important dates

Recent Updates

• Nov 25, 2014 Instead of a CD-ROM, a pdf file of the DPS2014 proceedings is distributed via networks.
• Nov 17, 2014 On-line registration is closed. On-site registration is available for those who would like to attend the DPS2014.
• Nov 12, 2014 Presentation Guidelines opened. Poster Program updated.
• Nov 11, 2014 Poster Program opened.
• Nov 10, 2014 Updated (Sponsors)
• Nov 6, 2014 Paper Submission Guidelines (JJAP) and Submission Page to JJAP special issue are updated.
• Oct 16, 2014 Updated (Sponsors)
• Oct 16, 2014 Tentative timetable is available.
• Oct 2, 2014 Information on accommodation is announced.
• Sep 18, 2014 Notification of abstract acceptance will be delayed.
• Sep 1, 2014 On-line submission system was closed.
• Aug 27, 2014 Submission deadline extended to Aug 31, 2014.
• Aug 8, 2014 Submission deadline extended to Aug 26, 2014.
• Aug 7, 2014 On-Line Registration system is open.
• July 25, 2014 Invited Speakers and tentative titles opened.
• June 25, 2014 On-Line Submission system is opened.
• June 2, 2014 Updeted (News for Japanese members).
• May 7, 2014  Important dates updated.
• April 11, 2014  DPS2014 website open.

News for Japanese members

応用物理学会プラズマエレクトロニクス分科会の協賛により、「第25回プラズマエレクトロニクス講習会」を DPS前日の11月26日(水)に 東京工業大学 田町キャンパス にて開催致します。
同講習会では、産業応用で必要とされるプロセスプラズマの生成、診断・制御、モニタリング技術の基本と、その先端応用技術について、各分野にて第一線でご活躍の先生方より御講義頂く予定です。詳しくは こちら をご参照ください。