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Recipients of DPS2017 Nishizawa Award:

David Barry Graves
University of California,Berkeley
Toshiaki Makabe
Professor Emeritus,
Keio University
Masahiro Yoneda


The 39th International Symposium on Dry Process (DPS2017) will be held at Tokyo Tech Front (Kuramae Kaikan), Ookayama Campus, Tokyo Institute of Technology, Tokyo in Japan on November 16 & 17, 2017. The Symposium covers all aspects of the rapidly evolving fields of dry processes, including but not limited to plasma etching and deposition processes, diagnostics and modeling of plasmas and surfaces, and surface modifications by plasmas, for the applications in, e.g., microelectronics, power devices, sensors, environmental protection, biological systems, and medicine. The DPS has provided valuable forums for in-depth discussion among professionals and students working in this exciting field for more than three decades.


Important dates

   Abstract Submission Deadline: July 14 July 24, 2017
   Early Registration Deadline: October 6, 2017
   Late Registration Deadline (Online): November 2, 2017

Recent Updates

News for the Special Issues of Japanese Journal of Applied Physics (JJAP).

DPS Paper Award Winners

DPS paper award that is given to excellent papers in the recent special issues of “Dry Process”, and the article is set “Open Access” for ever.

DPS2017 DPS Paper Award:

DPS2016 DPS Paper Award:

DPS2015 DPS Paper Award:

News for Japanese members

応用物理学会プラズマエレクトロニクス分科会の協賛により、「第28回プラズマエレクトロニクス講習会」を 2017 年11 月15 日(水)に東京大学 本郷(浅野)キャンパス 武田先端知ビル 「武田ホール」にて開催致します。
同講習会では、産業応用で必要とされる産業応用で必要とされるプロセスプラズマの生成、診断、制御の基礎と、その先端応用技術について、各分野にて第一線でご活躍の先生方より御講義頂く予定です。詳しくはこちら をご参照ください。