Committee Chairpersons

• Organizing Committee Chair: Miyako Matsui (Hitachi, Ltd.)
• Executive Committee Chair: Daisuke Ogawa (Chubu University)
• Program Committee Chair: Tomihito Ohba (Lam Research Corp.)
• Publication Committee Chair: Kazunori Koga (Kyushu University)

Organizing Committee

Chair:	M. Matsui (Hitachi, Ltd.) Japan
Vice-chair:	M. Honda (TOKYO ELECTRON MIYAGI LTD.) Japan
	H. Akatsuka (Tokyo Institute of Technology) Japan
	K. Eriguchi (Kyoto University) Japan
	M. Fukasawa (Sony Semiconductor Solutions Corp.) Japan
	H. Hayashi (Daikin Industries, Ltd.) Japan
	S. Higashi (Hiroshima University) Japan
	M. Hori (Nagoya University) Japan
	T. Ichiki (The University of Tokyo) Japan
	K. Ishikawa (Nagoya University) Japan
	K. Karahashi (Osaka University) Japan
	K. Kinoshita (AIO Core Co., Ltd.) Japan
	K. Koga (Kyushu University) Japan
	H. Kokura (Tokyo Electron Ltd.) Japan
	T. Koshizawa (Applied Materials Inc.) USA
	K. Kurihara (KIOXIA Corp.) Japan
	M. Kurihara (Hitachi, Ltd.) Japan
	T. Maruyama (Renesas Electronics Corp.) Japan
	Y. Morikawa (ULVAC Inc.) Japan
	M. Nakatani (Panasonic Industry Corp.) Japan
	T. Ohba (Lam Research Corp.) Japan
	D. Ogawa (Chubu University) Japan
	M. Omura (KIOXIA Corp.) Japan
	K. Satoh (Muroran Institute of Technology) Japan
	T. Shirafuji (Osaka Metropolitan University) Japan
	M. Shiratani (Kyushu University) Japan
	K. Takeda (Meijo University) Japan
	T. Tatsumi (Sony Semiconductor Solutions Corp.) Japan
	M. Terahara (Western Digital Corp.) Japan
	H. Toyoda (Nagoya University) Japan
	T. Watanabe (Waseda University) Japan

International Organizing Committee

	W. Boullart (Interuniversity Microelectronics Center-IMEC) Belgium
	M.C. Huang (MMSL, Industrial Technology Research Institute) Taiwan
	O. Joubert (LTM/CNRS) France
	W.M.M. Kessels (Eindhoven University of Technology) Netherlands
	H.J. Lee (Pusan National University) Korea
	K. C. Leou (National Tsing Hua University) Taiwan
	T. Lill (Lam Research Corp.) USA
	G. S. Oehrlein (University of Maryland) USA
	L. Overzet (University of Texas at Dallas) USA
	P. Ventzek (Tokyo Electron America Inc.) USA
	J.S. Wu (National Yang Ming Chiao Tung University) Taiwan
	G-Y. Yeom (Sungkyunkwan University) Korea

Executive Committee

Chair:	D. Ogawa (Chubu University) Japan
Vice-chair:	K. Satoh (Muroran Institute of Technology) Japan
Vice-chair:	T. Shirafuji (Osaka Metropolitan University) Japan
	M. Fukasawa (Sony Semiconductor Solutions Corp.) Japan
	H. Kondo (Kyushu University) Japan
	T. Tsutsumi (Nagoya University) Japan
	H. Kousaka (Gifu University) Japan
	D. Kuwahara (Chubu University) Japan

Publication Committee

Chair:	K. Koga (Kyushu University) Japan
Vice-chair:	K. Takeda (Meijo University) Japan
Vice-chair:	H. Toyoda (Nagoya University) Japan
	K. Ishikawa (Nagoya University) Japan
	N. Kuboi (Sony Semiconductor Solutions Corp.) Japan
	K. Kurihara (KIOXIA Corp. ) Japan
	S. Nunomura (Advanced Industrial Science and Technology-AIST) Japan
	T. Ohta (Meijo University) Japan
	K. Takenaka (Osaka University) Japan

Program Committee

Chair:	T. Ohba (Lam Research Corp.) Japan
Vice-chair:	M. Omura (KIOXIA Corp.) Japan
Vice-chair:	Y. Morikawa (ULVAC Inc.) Japan
	A. Abe (Sony Semiconductor Manufacturing Corp.) Japan
	K.H. Bai (Samsung Electronics Co., Ltd.) Korea
	R. L. Bruce (IBM Corp.) USA
	Y. Daigo (Tokyo Electron Ltd.) Japan
	E. Despiau-Pujo (CNRS/University of Grenoble Alpes) France
	R. Dussart (CNRS/Université d'Orléans) France
	A. Dzarasova (Quantemol Ltd.) UK
	D.J. Economou (University of Houston) USA
	S. U. Englemann (IBM Corp.) USA
	M. Fukasawa (Sony Semiconductor Solution Corp.) Japan
	I. P. Ganachev (Shibaura Mechatronics Corp.) Japan
	K. Hattori (Nagoya University) Japan
	N. Hayashi (Kyushu University) Japan
	T. Hayashi (Nagoya University) Japan
	S. Higashi (Hiroshima University) Japan
	M. Hiramatsu (Meijo University) Japan
	M. Honda (TOKYO ELECTRON MIYAGI LTD.) Japan
	T. Ichiki (The University of Tokyo) Japan
	K. Ishikawa (Nagoya University) Japan
	Y. Ishii (Hitachi High Technologies America, Inc.) USA
	S. Kanakamedala (Western Digital Corp.) USA
	S. Y. Kang (Samsung Electronics Co., Ltd.) Korea
	K. Karahashi (Osaka University) Japan
	K. Koga (Kyushu University) Japan
	H. Kokura (Tokyo Electron Ltd.) Japan
	H. Kondo (Kyushu University) Japan
	A. Koshiishi (Samsung Electronics Co., Ltd. ) Korea
	T. Koshizawa (Applied Materials Inc.) USA
	N. Kuboi (Sony Semiconductor Solutions Corp.) Japan
	K. Kurihara (KIOXIA Corp.) Japan
	M. Kurihara (Hitachi, Ltd.) Japan
	T. Maruyama (Renesas Electronics Corp.) Japan
	M. Matsui (Hitachi, Ltd.) Japan
	S. Miyazaki (Nagoya University) Japan
	H. Miyazoe (IBM Corp.) USA
	M. Morimoto (Hitachi High-Tech Corp.) Japan
	K. Nakamura (Chubu University) Japan
	M. Nakamura (MAMO) Japan
	S. Nunomura (Advanced Industrial Science and Technology -AIST) Japan
	S. Okita (Panasonic Connect Co., Ltd.) Japan
	M. Ohryoji (Western Digital Corp.) Japan
	M. Ohuchi (Micron Memory Japan, K.K.) Japan
	H. Ohtake (Hitachi High-Tech Corp.) Japan
	J-C. Park (Samsung Electronics Co., Ltd.) Korea
	E. Pargon (LTM-CNRS) France
	F. Roozeboom (University of Twente) Netherlands
	T. Seki (Kyoto University) Japan
	Y. Setsuhara (Osaka University) Japan
	P. Shen (Air Liquide Japan, Ltd.) Japan
	Y. Shimogaki (The University of Tokyo) Japan
	T. Shirafuji (Osaka Metropolitan University) Japan
	M. Shiratani (Kyushu University) Japan
	E. Stamate (Technical University of Denmark) Denmark
	K. Takahashi (Kyoto Institute of Technology) Japan
	K. Tapily (TEL Technology Center America) USA
	M. Terahara (Western Digital Corp.) Japan
	M. Titus (The University of Arizona) USA
	H. Toyoda (Nagoya University) Japan
	J. H. Um (Samsung Electronics Co., Ltd.) Korea
	T. Watanabe (Waseda University) Japan
	M. Yamada (Hitachi, Ltd.) Japan
	G-Y. Yeom (Sungkyunkwan University) Korea
	T-Y Yu (TSMC) Taiwan

Advisory Committee

Chair:	T. Makabe (Keio University) Japan
	S. Fujimura (Tokyo Institute of Technology) Japan
	J-G. Han (Sungkyunkwan University) Korea
	M. Izawa (Hitachi High-Tech Corp.) Japan
	K. Nojiri (Nanotech Research) Japan
	K. Ono (Osaka University) Japan
	H. Sugai (Nagoya University) Japan
	K. Tachibana (Kyoto University) Japan
	O. Takai (Kanto Gakuin University) Japan