DPS2023 44th International Symposium on Dry Process



In conjunction with



Recipients of DPS2023 Nishizawa Award:

Jean-Paul Booth
CNRS/Ecole Polytechnique

Nobuo Fujiwara
Mitsubishi Electric Corporation

Recipients of DPS2023 Achievement Award:

Yoshimichi Ohki
Professor Emeritus
Waseda University


The 44th International Symposium on Dry Process (DPS2023) will be held at Winc Aichi, Nagoya, Japan, from November 21 to 22, 2023. The Symposium covers all aspects of the rapidly evolving fields of dry processes, including but not limited to plasma etching and deposition processes, diagnostics and modeling of plasmas and surfaces, and surface modifications by plasmas, for the applications in, e.g., microelectronics, power devices, sensors, environmental protection, biological systems, and medicine. The DPS has provided valuable forums for in-depth discussion among professionals and students working in this exciting field for more than three decades.

Notice for DPS2023 Participants

DPS2023 will be held completely in person (On-site only).
Please note that live-streaming or archive for streaming will not be provided.

Important dates

Abstract Submission Deadline: July 21, 2023
Notification of Abstract Acceptance: September 15, 2023
Early Registration Deadline: October 6, 2023
Late Registration Deadline (Online): October 31, 2023
Publish Proceedings (Abstracts): November 14, 2023

Recent Updates

Nov. 06, 2023
Poster Program opened.
Oct. 31, 2023
On-line registration is closed. The registration at DPS2023 venue is also available.
Oct. 31, 2023
Timetable updated.
Oct. 23, 2023
Presentation Guidelines is opened.
Oct. 10, 2023
JJAP special issue On-Line Submission is opened.
Sep. 20, 2023
Timetable(Tentative) updated.
Sep. 15, 2023
Notification of abstract acceptance was announced.
Jul. 06, 2023
Information/Guideline for DPS Career Assistant Board is available.
Jun. 27, 2023
Timetable(Tentative) is available.
Jun. 26, 2023
On-Line registration opened.
May. 15 2023
On-Line Submission system is opened.
Feb. 15, 2023
DPS2023 website open.

News for the Special Issues of Japanese Journal of Applied Physics (JJAP).

IF for the special issue of DPS in JJAP

1.67 (2017)


News for Japanese members

応用物理学会プラズマエレクトロニクス分科会の主催により、「第34回プラズマエレクトロニクス講習会」を 2023 年 11 月 17 日(金) にJEC日本研修センター 心斎橋とオンライン(Zoomウェビナー)のハイブリッド開催を致します。 本講習会では産業応用で必要とされるプロセスの基礎と高周波プラズマの生成制御について、プラズマ分野を代表する先生方からご講義いただきます。詳しくはこちら をご参照ください。